PHI710 (manufacturer - Physical Electronics, USA, 2020) - Auger electrons system with the modern Auger electrons spectrometer, which provides information on the elemental composition and chemical state of elements on the surface of the sample, objects of nanometric size, thin films and their contact surfaces. The Auger spectrometer is most effective in the study of light elements (from Li to Sn). The spectrometer is characterized by high-quality images, formed by Auger electrons, high spatial resolution (8 nm), high sensitivity and spectral resolution.
The spectrometer has a coaxial Schotky-type field emission electron source (accelerating voltage of 1-25 kV) therefore can work in a scanning electron microscope (SEM) mode and is equipped with an X-ray energy dispersion spectrometer (EDS).
For etching the surface of the sample (surface cleaning, depth profiling of chemical composition), a source of argon ions is used, the accelerating voltage of which can vary from 0.02 to 4 kV.
A cylindrical mirror analyzer (CMA) forms a shadowless image of objects on a surface.
X-ray spectrometer with X-Max detector (without beryllium window, detector area 50 mm2).
Resolution:
- Scanning electron microscope – 3 nm
- Auger electrons – 8 nm
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X-ray diffractometer SmartLab (Rigaku, Japan, 2011): 9 kW x-ray tube with rotating Cu anode; Optics for polycrystalline samples: parallel beam/Bragg-Brentano, polycapillary; CALSA – crystal array monochromator of especially high resolution and intensity for diffracted beam (Cu Kα1 for polycrystalline specimens); bent/flat graphite monochromator for diffracted beam; High resolution optics: Ge monochromators: Ge (220)x2, Ge (220)x4, Ge (400)x2; analysers: Ge (220)x2, Ge (400)x2; Detectors: scintillation SC-70, 1D (linear) D/teX Ultra, 2D (two dimensional) Pilatus 100K; Sample stages: Eulerian cradle ((Ψ, φ, x, y, z), X-Y (50-50 mm) stage, RxRy stage, stage for powder samples, high temperature stage Anton Paar DHS 1100 (temperatures up to +1100 °C in vacuum or He gas atmosphere); Vacuumed path for x-rays diffracted at small angles (SAXS); Special axis for In-plane method; Powder diffraction database PDF4+ (2017 release).
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X-ray diffractometer D8 Advance (Bruker AXS, Germany, 2003 m.): 2,4 kW sealed x-ray tube with Cu anode; Optics: parallel beam/Bragg-Brentano; V grove Ge monochromator; Scintillation detector; Sample stages: Eulerian cradle (Ψ, φ, x, y, z); Powder diffraction database PDF2 (2003 release).
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Fluorescent x-ray spectrometer with wave dispersion (WDXRF) Axios mAX (Panalytical, Netherlands, 2011). 4 kW x-ray tube with Rh anode STmax160; Detectors: proportional flow, proportional sealed (with Xe gas), highly effective scintillation; Six crystals-analysers (elements from O to U); Software: SuperQ – for standard-less quantitative analysis; Ni-Fe-Co – for quantitative analysis of alloys; FP-Multi - for quantitative analysis and determination of thickness of thin films; Pro-Trace - for quantitative analysis of trace elements.
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Scanning electron microscope Helios NanoLab 650 (FEI, Netherlands, 2011) with Schottky type field emission electron source, focussed galium ion source – FIB, TEM sample lift-out mechanism Omniprobe 100.7 (Oxford Instruments), platinum deposition and selective carbon mill gas injection systems, cryocleaner and plasma cleaner. X-ray spectrometer INCAEnergy (Oxford Instruments) with X-Max detector. Dedicated for imagining of surface (resolution 0.8 – 0.9 nm), preparation imagining of cross-sections, local chemical analysis.
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Scanning electron microscope EVO-50 EP (Carl Zeiss SMT, Germany, 2006) with tungsten and LaB6 electron sources, secondary, VP secondary and backscattered electron detectors, energy and wave dispersion (EDS and WDS) X-Ray spectrometers INCA (Oxford Instruments). Dedicated for imagining of surface, local chemical analysis.
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Transmission electron microscope Tecnai G2 F20 X-TWIN (FEI, Netherlands, 2011) with Schottky type field emission electron source. Flexible high tension: 20, 40, 80, 120, 160, 200 kV. High angle annular dark field (HAADF) detector, energy dispersive x-ray spectrometer EDAX with r-TEM detector, 11 MPix ORIUS SC1000B (Gatan) CCD camera, single and double tilt specimen holders, sample plasma cleaner. Resolution (point, line) - (0,25-0,102 nm). Dedicated for studies of internal structure and chemical composition of solid materials and nanostructures.
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Carbon and sulphur analyzer CS-2000. Dedicated for precise determination of carbon and sulphur.
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„Spectrometer of x-ray photoelectrons AXIS Supra+“ (Kratos Analytical, UK, 2019)
Monochromatic X-ray source with Al/Ag anode to produce X-rays at 1487/2984 eV;
Gas Cluster Ion Source (GCIS, Minibeam 6):
- Monoatomic Mode – a beam of Ar+ ions of energy 500 eV to 8 keV suitable for sputter depth profiling of inorganic or metallic materials,
- Cluster Mode – a beam of Arn+ cluster ions is produced at energies up to 20 keV suitable for the depth profiling of organic and polymeric materials.
Hemispherical analyser (HSA) and spherical mirror analyser (SMA) (elements above Li);
Delay-Line Detector (DLD): scanned spectroscopy, un-scanned snapshot spectroscopy and 2D imaging modes.
Heat and cool accessories allow samples mounted on a heat/cool sample holder to be heated up to +800 °C or cooled to <-100 °C before or during the measurement.
The charge neutraliser provides a source of low energy electrons to neutralise positive charge built up on the insulator sample surface.
Ion Scattering Spectrometry (ISS) – extremely surface sensitive technique, Ultraviolet Photoelectron Spectroscopy (UPS) – designed for valence band acquisition and electronic workfunction measurement.
The air sensitive transporter allows to transfer samples that are sensitive to atmospheric contamination or reaction from a clean area.
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